Organic field ionization source

ABSTRACT

An organic field ionization source is provided including an ionization needle, an extraction electrode, a voltage source, and a heated reservoir. The ionization needle defines a tip. The extraction electrode defines an extraction aperture therein and the extraction electrode is positioned such that the extraction aperture is disposed proximate the tip of the ionization needle. The voltage source is arranged to maintain the tip of the ionization needle at a high potential relative to the extraction electrode. The heated reservoir contains an organic ion source material therein in contact with the ionization needle. The heated reservoir is arranged to maintain a temperature of the organic ion source material at a magnitude sufficient to encourage capillary flow of the organic ion source material from the heated reservoir along the ionization needle to the tip of the needle. The high potential, the extraction electrode, the tip of the ionization needle, and the organic ion source material are selected and arranged such that the organic material is ionized at the tip of the needle and such that organic ions are drawn through the extraction aperture from the tip of the needle. The organic ion source material preferably comprises coronene, phenylalanine, a vacuum grease, a diffusion pump oil, or another organic material with a high boiling point.

BACKGROUND OF THE INVENTION

[0001] The present invention relates to ion beam devices and, moreparticularly, to a field ionization source that is specially configuredto minimize contamination of an ion beam target.

[0002] Liquid metal ion guns are used routinely to generate focused ionbeams for analysis of a substrate. Liquid metal ion sources aretypically very bright and are well-suited for applications requiringsharp focus of the ion beam and maintenance of a suitable ion fluence.Typically, the ion fluence of a liquid metal ion gun is of the sameorder as that of a field emission source of a conventional scanningelectron microscope. However, liquid metal ion guns typically usegallium, indium, or gold.

[0003] The present invention embodies the recognition that gallium,indium, gold, and other conventional materials are not well suited forall ion source applications. For example, where an ion beam is to beused to analyze a semiconductor target, the use of gallium, indium, orgold as a sputter ion source material may lead to unacceptablecontamination of the substrate. Accordingly, there is a need for a fieldionization source that does not embody the disadvantages of theconventional types of ion sources, particularly in the context offocused ion beam defect analysis systems.

BRIEF SUMMARY OF THE INVENTION

[0004] This need is met by the present invention wherein an organicfield ionization source is provided and is arranged to be suitable foruse in focused ion beam defect analysis systems.

[0005] In accordance with one embodiment of the present invention, anorganic field ionization source is provided comprising: an ionizationneedle, an extraction electrode, a voltage source, and a heatedreservoir. The ionization needle defines a tip. The extraction electrodedefines an extraction aperture therein and is positioned such that theextraction aperture is disposed proximate the tip of the ionizationneedle. The voltage source is arranged to maintain the tip of theionization needle at a high potential relative to the extractionelectrode. The heated reservoir contains an organic ion source materialtherein in contact with the ionization needle. The heated reservoir isarranged to maintain a temperature of the organic ion source material ata magnitude sufficient to encourage capillary flow of the organic ionsource material from the heated reservoir along the ionization needle tothe tip of the needle. The high potential, the extraction electrode, thetip of the ionization needle, and the organic ion source material areselected and arranged such that the organic material is ionized at thetip of the needle and such that organic ions are drawn through theextraction aperture from the tip of the needle.

[0006] The organic ion source material preferably comprises coronene,phenylalanine, a vacuum grease, a diffusion pump oil, or another organicmaterial with a boiling point of at least from about 250° C. to about450° C.

[0007] In accordance with another embodiment of the present invention, afocused ion beam defect analysis system is provided comprising anorganic field ionization source, a target, and an electrode assembly.The organic field ionization source comprises an ionization needle, anextraction electrode, a voltage source, and a heated reservoir. Theionization needle defines a tip. The extraction electrode defines anextraction aperture therein and is positioned such that the extractionaperture is disposed proximate the tip of the ionization needle. Thevoltage source is arranged to maintain the tip of the ionization needleat a high potential relative to the extraction electrode. The heatedreservoir contains an organic ion source material therein in contactwith the ionization needle and is arranged to maintain a temperature ofthe organic ion source material at a magnitude sufficient to encouragecapillary flow of the organic ion source material from the heatedreservoir along the ionization needle to the tip of the needle. The highpotential, the extraction electrode, the tip of the ionization needle,and the organic ion source material are selected and arranged such thatthe organic material is ionized at the tip of the needle and such thatorganic ions are drawn through the extraction aperture from the tip ofthe needle. The target is subject to analysis by the organic ions andthe electrode assembly is arranged along the path of the ions and isconfigured to direct the organic ions to the target.

[0008] The organic ions may comprise fragments of the organic ion sourcematerial and the electrode assembly may include a filter arranged tocause selected ones of the fragments to be directed away from thetarget. The filter may comprise a Wein filter, a magnetic sector, or atime-of-flight system. The electrode assembly may include an ionaccelerating electrode, an ion beam focusing electrode, ion beamscanning electrode, and a ion beam deflecting electrode.

[0009] In accordance with yet another embodiment of the presentinvention, a focused ion beam defect analysis system is providedcomprising an organic field ionization source, a target, an electrodeassembly, and a particle analyzer. The organic field ionization sourceis arranged to ionize organic ion source material. The electrodeassembly is arranged along the path of the ions and is configured todirect the organic ions to the target. The target is subject to analysisby the organic ions and the particle analyzer is arranged to detectparticles ejected from the target in response to the incidence of theorganic ions on the target.

[0010] Accordingly, it is an object of the present invention to providea field ionization source that is specially configured to minimizecontamination of an ion beam target so as to be suitable for use infocused ion beam defect analysis systems, focused ion beam millingsystems, or other types of focused ion beam systems. Other objects ofthe present invention will be apparent in light of the description ofthe invention embodied herein.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

[0011] The following detailed description of the preferred embodimentsof the present invention can be best understood when read in conjunctionwith the following drawings, where like structure is indicated with likereference numerals and in which:

[0012]FIG. 1 is a schematic illustration of a focused ion beam defectanalysis system including an organic field ionization source accordingto the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Referring now to FIG. 1, a focused ion beam defect analysissystem 10 and an organic field ionization source 20 according to thepresent invention is illustrated in detail. As will be appreciated bythose practicing the present invention, the organic field ionizationsource 20 is arranged to operate in a vacuum. The focused ion beamdefect analysis system 10 comprises the organic field ionization source20, a target 40 subject to analysis, an electrode assembly 50, and aparticle analyzer 60. The organic field ionization source 20 includes anionization needle 22 defining a tip 26. The ionization source 20 furtherincludes an extraction electrode assembly 28 incorporating an extractor30 and a suppressor 32, each defining an extraction aperture 34 therein.Additionally, the ionization source 20 includes a voltage source 36 anda heated reservoir 38 containing an organic ion source material therein.

[0014] The extraction electrode assembly 28 is positioned such that theextraction aperture 34 is disposed proximate the tip 26 of theionization needle 22. The voltage source 36 is arranged to maintain theionization needle 22 and, more particularly, the tip 26 of theionization needle 22, at a high positive potential relative to theextraction electrode assembly 28.

[0015] The heated reservoir 38 contains the organic ion source materialin contact with the ionization needle 22 and is arranged to maintain thetemperature of the organic ion source material at a magnitude sufficientto encourage capillary flow of the organic ion source material from theheated reservoir 38 along the ionization needle 22 to the tip 26 of theneedle 22. The magnitude of the high potential and the relativepositions of the extraction electrode assembly 28, the extractionaperture 34 and the tip of the ionization needle 22 are selected suchthat the organic ion source material is ionized at the tip of 26 of theneedle 22 and such that organic ions are drawn through the extractionaperture 34 from the tip 26 of the needle 22. The specific selection andarrangement of these elements and the specific operating parametersutilized according to the present invention will vary depending on thedesign preferences of those practicing the present invention and thenature of the organic ion source material utilized. It is noted that asuitable voltage source 36 will be capable of generating a potentialdifference of about 1000 V to about 50,000 V between the ionizationneedle 22 and the extraction electrode assembly 28. The spacing betweenthe tip 26 of the needle 22 and the extraction aperture 34 is typicallyabout 0.1 mm to about 5.0 mm. The temperature imposed upon the organicion source material by the heated reservoir 38 is selected to besufficient to place the material in a low viscosity liquid phase. It iscontemplated by the present invention that suitable operating parametersmay be determined without undue experimentation by those of ordinaryskill in the art of focused ion beam generation. Any one of a number ofcommercially available reservoir and needle arrangements may be suitablefor use in the present invention. For example, a suitable heatedreservoir 38 and needle 22 arrangement is available as a two lens ioncolumn from the FEI Company of Hillsboro, Oreg. under the productidentifier 2LI.

[0016] The target 40 typically comprises a semiconductor substrate butmay comprise any substrate suitable for analysis by organic ions.According to one embodiment of the present invention, the organic ionsdrawn through the extraction aperture 34 and focused by the electrodeassembly 50 cause ejection of particles from the target 40. The particleanalyzer 60 is arranged to detect the ejected particles and provide anoutput indicative of the nature of the ejected particles. This output isutilized to characterize and analyze the target 40.

[0017] The electrode assembly 50 is arranged along the path of theorganic ions drawn through the extraction aperture 34 and is configuredto direct the organic ions to the target 40. The specific nature anddesign of the electrode assembly 50 is beyond the scope of the presentinvention. However, it is noted that the design of the electrodeassembly 50 may be derived or taken directly from existing focused ionbeam system designs. In fact, it is noted that the organic fieldionization source 20 may be employed in a commercially available focusedion beam system, such as a two lens ion column available from the FEICompany of Hillsboro, Oreg. under the product identifier the FEI Companyof Hillsboro, Oreg. under the product identifier 2LI.

[0018] Typically, the organic ions drawn through the extraction aperture34 comprise fragments of the organic ion source material. In which case,the electrode assembly 50 may include a filter, e.g., a Wein filter, amagnetic sector, or time-of-flight device, arranged to cause selectedones of the fragments to be directed away from the target 40. Theelectrode assembly 50 also typically includes an ion acceleratingelectrode, an ion beam focusing electrode, an ion beam scanningelectrode, and ion beam deflecting electrode to enhance and direct theincidence of organic ions on the target 40.

[0019] Suitable organic ion source materials comprises coronene,phenylalanine, or any one of a number of vacuum greases or diffusionpump oils. Preferably, the organic ion source material comprises anorganic material with a boiling point of at least about 250° C. to about450° C. These types of organic materials are particularly well-suitedfor used in focused ion beam defect analysis systems because they areless likely that conventional liquid metal ion sources to causedeleterious contamination of the target under examination.

[0020] Having described the invention in detail and by reference topreferred embodiments thereof, it will be apparent that modificationsand variations are possible without departing from the scope of theinvention defined in the appended claims.

What is claimed is:
 1. An organic field ionization source comprising: anionization needle defining a tip; an extraction electrode defining anextraction aperture therein, wherein said extraction electrode ispositioned such that said extraction aperture is disposed proximate saidtip of said ionization needle; a voltage source arranged to maintainsaid tip of said ionization needle at a high potential relative to saidextraction electrode; and a heated reservoir containing an organic ionsource material therein in contact with said ionization needle, saidheated reservoir being arranged to maintain a temperature of saidorganic ion source material at a magnitude sufficient to encouragecapillary flow of said organic ion source material from said heatedreservoir along said ionization needle to said tip of said needle,wherein said high potential, said extraction electrode, said tip of saidionization needle, and said organic ion source material are selected andarranged such that said organic material is ionized at said tip of saidneedle and such that organic ions are drawn through said extractionaperture from said tip of said needle.
 2. An organic field ionizationsource as claimed in claim 1 wherein said organic ions comprisefragments of said organic ion source material.
 3. An organic fieldionization source as claimed in claim 1 wherein said voltage source isarranged such that said of said ionization needle is maintained at ahigh positive potential relative to said extraction electrode.
 4. Anorganic field ionization source as claimed in claim 1 wherein saidorganic field ionization source is arranged to operate in a vacuum. 5.An organic field ionization source comprising: an ionization needledefining a tip; an extraction electrode defining an extraction aperturetherein, wherein said extraction electrode is positioned such that saidextraction aperture is disposed proximate said tip of said ionizationneedle; a voltage source arranged to maintain said tip of saidionization needle at a high potential relative to said extractionelectrode; and a heated reservoir containing coronene therein in contactwith said ionization needle, said heated reservoir being arranged tomaintain a temperature of said coronene at a magnitude sufficient toencourage capillary flow of said coronene from said heated reservoiralong said ionization needle to said tip of said needle, wherein saidhigh potential, said extraction electrode, said tip of said ionizationneedle, and said coronene are selected and arranged such that saidorganic material is ionized at said tip of said needle and such thatorganic ions are drawn through said extraction aperture from said tip ofsaid needle.
 6. An organic field ionization source comprising: anionization needle defining a tip; an extraction electrode defining anextraction aperture therein, wherein said extraction electrode ispositioned such that said extraction aperture is disposed proximate saidtip of said ionization needle; a voltage source arranged to maintainsaid tip of said ionization needle at a high potential relative to saidextraction electrode; and a heated reservoir containing phenylalaninetherein in contact with said ionization needle, said heated reservoirbeing arranged to maintain a temperature of said phenylalanine at amagnitude sufficient to encourage capillary flow of said phenylalaninefrom said heated reservoir along said ionization needle to said tip ofsaid needle, wherein said high potential, said extraction electrode,said tip of said ionization needle, and said phenylalanine are selectedand arranged such that said organic material is ionized at said tip ofsaid needle and such that organic ions are drawn through said extractionaperture from said tip of said needle.
 7. An organic field ionizationsource comprising: an ionization needle defining a tip; an extractionelectrode defining an extraction aperture therein, wherein saidextraction electrode is positioned such that said extraction aperture isdisposed proximate said tip of said ionization needle; a voltage sourcearranged to maintain said tip of said ionization needle at a highpotential relative to said extraction electrode; and a heated reservoircontaining a vacuum grease therein in contact with said ionizationneedle, said heated reservoir being arranged to maintain a temperatureof said vacuum grease at a magnitude sufficient to encourage capillaryflow of said vacuum grease from said heated reservoir along saidionization needle to said tip of said needle, wherein said highpotential, said extraction electrode, said tip of said ionizationneedle, and said vacuum grease are selected and arranged such that saidorganic material is ionized at said tip of said needle and such thatorganic ions are drawn through said extraction aperture from said tip ofsaid needle.
 8. An organic field ionization source comprising: anionization needle defining a tip; an extraction electrode defining anextraction aperture therein, wherein said extraction electrode ispositioned such that said extraction aperture is disposed proximate saidtip of said ionization needle; a voltage source arranged to maintainsaid tip of said ionization needle at a high potential relative to saidextraction electrode; and a heated reservoir containing a diffusion pumpoil therein in contact with said ionization needle, said heatedreservoir being arranged to maintain a temperature of said diffusionpump oil at a magnitude sufficient to encourage capillary flow of saiddiffusion pump oil from said heated reservoir along said ionizationneedle to said tip of said needle, wherein said high potential, saidextraction electrode, said tip of said ionization needle, and saiddiffusion pump oil are selected and arranged such that said organicmaterial is ionized at said tip of said needle and such that organicions are drawn through said extraction aperture from said tip of saidneedle.
 9. An organic field ionization source comprising: an ionizationneedle defining a tip; an extraction electrode defining an extractionaperture therein, wherein said extraction electrode is positioned suchthat said extraction aperture is disposed proximate said tip of saidionization needle; a voltage source arranged to maintain said tip ofsaid ionization needle at a high potential relative to said extractionelectrode; and a heated reservoir containing an organic ion sourcematerial therein, wherein said organic ion source material ischaracterized by a boiling point of at least about 250° C. to about 450°C., said heated reservoir is arranged such that said organic ion sourcematerial is in contact with said ionization needle and such that atemperature of said organic ion source material is maintained at amagnitude sufficient to encourage capillary flow of said organic ionsource material from said heated reservoir along said ionization needleto said tip of said needle, and said high potential, said extractionelectrode, said tip of said ionization needle, and said organic ionsource material are selected and arranged such that said organicmaterial is ionized at said tip of said needle and such that organicions are drawn through said extraction aperture from said tip of saidneedle.
 10. A focused ion beam system comprising: an organic fieldionization source comprising: an ionization needle defining a tip, anextraction electrode defining an extraction aperture therein, whereinsaid extraction electrode is positioned such that said extractionaperture is disposed proximate said tip of said ionization needle, avoltage source arranged to maintain said tip of said ionization needleat a high potential relative to said extraction electrode, and a heatedreservoir containing an organic ion source material therein in contactwith said ionization needle, said heated reservoir being arranged tomaintain a temperature of said organic ion source material at amagnitude sufficient to encourage capillary flow of said organic ionsource material from said heated reservoir along said ionization needleto said tip of said needle, wherein said high potential, said extractionelectrode, said tip of said ionization needle, and said organic ionsource material are selected and arranged such that said organicmaterial is ionized at said tip of said needle and such that organicions are drawn through said extraction aperture from said tip of saidneedle; a target subject to analysis by said organic ions; and anelectrode assembly arranged along the path of said ions and configuredto direct said organic ions to said target.
 11. A focused ion beamsystem as claimed in claim 10 wherein said organic ions comprisefragments of said organic ion source material and wherein said electrodeassembly includes a filter arranged to cause selected ones of saidfragments to be directed away from said target.
 12. A focused ion beamas claimed in claim 11 wherein said filter comprises a Wein filter, amagnetic sector, or a time-of-flight apparatus.
 13. A focused ion beamsystem as claimed in claim 10 wherein said electrode assembly includesan ion accelerating electrode.
 14. A focused ion beam system as claimedin claim 10 wherein said electrode assembly includes an ion beamfocusing electrode.
 15. A focused ion beam system as claimed in claim 10wherein said electrode assembly includes an ion beam scanning electrode.16. A focused ion beam system as claimed in claim 10 wherein saidelectrode assembly includes an ion beam deflecting electrode.
 17. Afocused ion beam system as claimed in claim 10 wherein said organic ionsource material comprises coronene.
 18. A focused ion beam system asclaimed in claim 10 wherein said organic ion source material comprisesphenylalanine.
 19. A focused ion beam system as claimed in claim 10wherein said organic ion source material comprises a vacuum grease. 20.A focused ion beam system as claimed in claim 10 wherein said organicion source material comprises a diffusion pump oil.
 21. A focused ionbeam system as claimed in claim 10 wherein said organic ion sourcematerial comprises an organic material with a boiling point of at leastabout 250° C. to about 450° C.
 22. A focused ion beam target surfaceanalysis system comprising: an organic field ionization sourcecomprising an ionization needle defining a tip, an extraction electrodedefining an extraction aperture therein, wherein said extractionelectrode is positioned such that said extraction aperture is disposedproximate said tip of said ionization needle, a voltage source arrangedto maintain said tip of said ionization needle at a high potentialrelative to said extraction electrode, a heated reservoir containing anorganic ion source material therein in contact with said ionizationneedle, said heated reservoir being arranged to maintain a temperatureof said organic ion source material at a magnitude sufficient toencourage capillary flow of said organic ion source material from saidheated reservoir along said ionization needle to said tip of saidneedle, wherein said high potential, said extraction electrode, said tipof said ionization needle, and said organic ion source material areselected and arranged such that said organic material is ionized at saidtip of said needle and such that organic ions are drawn through saidextraction aperture from said tip of said needle; a target subject toanalysis by said organic ions; an electrode assembly arranged along thepath of said ions and configured to direct said organic ions to saidtarget such that said organic ions cause ejection of particles from saidtarget; and a particle analyzer arranged to detect said ejectedparticles.